Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431185 | Apparatus and method for cleaning a semiconductor substrate | Hiroshi Tomita, Soichi Nadahara | 2002-08-13 |
| 6420271 | Method of forming a pattern | Yasuhiko Sato, Eishi Shiobara, Yasunobu Onishi, Hiroshi Tomita, Tokuhisa Ohiwa +2 more | 2002-07-16 |