Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492271 | Semiconductor device and method of manufacturing the same | Yoshihiro Uozumi, Hisashi Okuchi, Yoshihiro Ogawa, Hiroshi Tomita | 2002-12-10 |
| 6436723 | Etching method and etching apparatus method for manufacturing semiconductor device and semiconductor device | Hiroshi Tomita | 2002-08-20 |
| 6431185 | Apparatus and method for cleaning a semiconductor substrate | Hiroshi Tomita, Motoyuki Sato | 2002-08-13 |