Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492271 | Semiconductor device and method of manufacturing the same | Yoshihiro Uozumi, Hisashi Okuchi, Soichi Nadahara, Yoshihiro Ogawa | 2002-12-10 |
| 6436723 | Etching method and etching apparatus method for manufacturing semiconductor device and semiconductor device | Soichi Nadahara | 2002-08-20 |
| 6431185 | Apparatus and method for cleaning a semiconductor substrate | Soichi Nadahara, Motoyuki Sato | 2002-08-13 |
| 6420271 | Method of forming a pattern | Yasuhiko Sato, Eishi Shiobara, Motoyuki Sato, Yasunobu Onishi, Tokuhisa Ohiwa +2 more | 2002-07-16 |
| 6404317 | Planar magnetic element | Tetsuhiko Mizoguchi, Toshiro Sato, Masashi Sahashi, Michio Hasegawa, Atsuhito Sawabe | 2002-06-11 |
| 6399526 | Heat treating apparatus using quartz glass | Tsuneo Ishii, Chie Hongo | 2002-06-04 |
| 6368984 | Insulating film and method of forming the same | Mamoru Takahashi, Yoshio Ozawa | 2002-04-09 |
| 6363395 | Method and system for browsing data on a storage device | Tetsuo Tanaka, Toshiaki Kohno | 2002-03-26 |