Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476401 | Moving photocathode with continuous regeneration for image conversion in electron beam lithography | Lee H. Veneklasen, Bart Scholte van Mast | 2002-11-05 |
| 6429443 | Multiple beam electron beam lithography system | Steven Thomas Coyle, Andres Fernandez, Tai-Hon Philip Chang | 2002-08-06 |
| 6399934 | Optical coupling to gated photocathodes | Jeffrey S. Sullivan, Steven Thomas Coyle, Andres Fernandez | 2002-06-04 |
| 6376984 | Patterned heat conducting photocathode for electron beam source | Andres Fernandez, Tai-Hon Philip Chang, Kim Y. Lee, Steven Thomas Coyle | 2002-04-23 |
| 6376985 | Gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Tai-Hon Philip Chang, C. Neil Berglund | 2002-04-23 |