Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429443 | Multiple beam electron beam lithography system | Marian Mankos, Steven Thomas Coyle, Andres Fernandez | 2002-08-06 |
| 6376984 | Patterned heat conducting photocathode for electron beam source | Andres Fernandez, Marian Mankos, Kim Y. Lee, Steven Thomas Coyle | 2002-04-23 |
| 6376985 | Gated photocathode for controlled single and multiple electron beam emission | Kim Y. Lee, Marian Mankos, C. Neil Berglund | 2002-04-23 |