Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429443 | Multiple beam electron beam lithography system | Marian Mankos, Steven Thomas Coyle, Tai-Hon Philip Chang | 2002-08-06 |
| 6399934 | Optical coupling to gated photocathodes | Jeffrey S. Sullivan, Steven Thomas Coyle, Marian Mankos | 2002-06-04 |
| 6376984 | Patterned heat conducting photocathode for electron beam source | Marian Mankos, Tai-Hon Philip Chang, Kim Y. Lee, Steven Thomas Coyle | 2002-04-23 |