Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476401 | Moving photocathode with continuous regeneration for image conversion in electron beam lithography | Marian Mankos, Bart Scholte van Mast | 2002-11-05 |
| 6465795 | Charge neutralization of electron beam systems | Juan R. Madonado, Matthias Brunner, Ralf Schmid | 2002-10-15 |
| 6455863 | Apparatus and method for forming a charged particle beam of arbitrary shape | Sergey Babin | 2002-09-24 |
| 6392333 | Electron gun having magnetic collimator | William J. DeVore, Rudy F. Garcia | 2002-05-21 |
| 6373071 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Robert A. Innes, Sergey Babin, Robin L. Teitzel | 2002-04-16 |