Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495196 | Process and apparatus for profile control of direct coaters | Melville D. Ball | 2002-12-17 |
| 6444269 | Apparatus and method for coating sheet or strip articles | David G. Hallam | 2002-09-03 |
| 6420717 | Method and apparatus for real-time correction of resist heating in lithography | Sergey Babin | 2002-07-16 |
| 6379851 | Methods to predict and correct resist heating during lithography | — | 2002-04-30 |
| 6376012 | Control of coating thickness in sheet article coaters | Melville D. Ball | 2002-04-23 |
| 6373071 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Sergey Babin, Robin L. Teitzel, Lee H. Veneklasen | 2002-04-16 |