Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455863 | Apparatus and method for forming a charged particle beam of arbitrary shape | Lee H. Veneklasen | 2002-09-24 |
| 6420717 | Method and apparatus for real-time correction of resist heating in lithography | Robert A. Innes | 2002-07-16 |
| 6373071 | Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography | Robert A. Innes, Robin L. Teitzel, Lee H. Veneklasen | 2002-04-16 |