Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472301 | Method and structure for shallow trench isolation | Chuan Lin, Thomas Schafbauer | 2002-10-29 |
| 6440759 | Method of measuring combined critical dimension and overlay in single step | Martin Commons, Tobias Mono, Velt Klee, John Pohl | 2002-08-27 |