Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421820 | Semiconductor device fabrication using a photomask with assist features | Lars Liebmann, Shahid Butt, Henning Haffner | 2002-07-16 |
| 6413683 | Method for incorporating sub resolution assist features in a photomask layout | Lars Liebmann | 2002-07-02 |
| 6346979 | Process and apparatus to adjust exposure dose in lithography systems | Christopher P. Ausschnitt, Mark Neisser, Christopher D. Wait | 2002-02-12 |