Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460265 | Double-sided wafer exposure method and device | H. Bernhard Pogge | 2002-10-08 |
| 6429667 | Electrically testable process window monitor for lithographic processing | Christopher E. Obszarny | 2002-08-06 |
| 6417929 | Optical measurement of lithographic power bias of minimum features | Christopher J. Progler | 2002-07-09 |
| 6346979 | Process and apparatus to adjust exposure dose in lithography systems | Scott M. Mansfield, Mark Neisser, Christopher D. Wait | 2002-02-12 |
| 6335151 | Micro-surface fabrication process | Nancy Anne Greco, Ernest N. Levine | 2002-01-01 |