Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421820 | Semiconductor device fabrication using a photomask with assist features | Scott M. Mansfield, Shahid Butt, Henning Haffner | 2002-07-16 |
| 6413683 | Method for incorporating sub resolution assist features in a photomask layout | Scott M. Mansfield | 2002-07-02 |
| 6338922 | Optimized alternating phase shifted mask design | Alfred Wong | 2002-01-15 |