Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421820 | Semiconductor device fabrication using a photomask with assist features | Scott M. Mansfield, Lars Liebmann, Henning Haffner | 2002-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6421820 | Semiconductor device fabrication using a photomask with assist features | Scott M. Mansfield, Lars Liebmann, Henning Haffner | 2002-07-16 |