Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432318 | Dielectric etch process reducing striations and maintaining critical dimensions | Hidehiro Kojiri, Yoshio Ishikawa, Keiji Horioka, Ruiping Wang, Robert Wu +1 more | 2002-08-13 |