Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480418 | Semiconductor non-volatile storage | Toshihiro Tanaka, Yutaka Shinagawa, Kazuyoshi Shiba, Kazufumi Suzukawa, Masamichi Fujito +2 more | 2002-11-12 |
| 6480518 | Synthetic quartz glass member for use in ArF excimer laser lithography | Akira Fujinoki, Hiroyuki Nishimura, Yasuyuki Yaginuma | 2002-11-12 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Shoji Hotta, Hideo Aoki +1 more | 2002-01-22 |