Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451665 | Method of manufacturing a semiconductor integrated circuit | Takashi Yunogami, Yuzuru Ohji, Sukeyoshi Tsunekawa, Masahiko Hiratani, Yuichi Matsui | 2002-09-17 |
| 6432835 | Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio | Takashi Yunogami | 2002-08-13 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2002-01-22 |