Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492730 | Method for fabricating semiconductor integrated circuit | Yoshitaka Nakamura, Tsuyoshi Tamaru, Naoki Fukuda, Hidekazu Goto, Isamu Asano +5 more | 2002-12-10 |
| 6399438 | Method of manufacturing semiconductor integrated circuit device having a capacitor | Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada +8 more | 2002-06-04 |
| 6342412 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 2002-01-29 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Kazuo Nojiri, Takashi Yunogami, Shoji Hotta, Takayuki Oshima +1 more | 2002-01-22 |