Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499315 | Production method for making an optical member for excimer laser using synthetic quartz glass | Hiroyuki Nishimura, Hisatoshi Otsuka | 2002-12-31 |
| 6483639 | Optical system for integrated circuit fabrication | Hiroyuki Nishimura | 2002-11-19 |
| 6480518 | Synthetic quartz glass member for use in ArF excimer laser lithography | Takayuki Oshima, Hiroyuki Nishimura, Yasuyuki Yaginuma | 2002-11-12 |