Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499315 | Production method for making an optical member for excimer laser using synthetic quartz glass | Hiroyuki Nishimura, Akira Fujinoki | 2002-12-31 |
| 6413682 | Synthetic quartz glass substrate for photomask and making method | Yukio Shibano | 2002-07-02 |
| 6339940 | Synthetic quartz glass manufacturing process | Motoyuki Yamada, Koji Matsuo | 2002-01-22 |