Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489612 | Method of measuring film thickness | Toshio Kodama, Toshiaki Fujii | 2002-12-03 |
| 6472881 | Liquid metal ion source and method for measuring flow impedance of liquid metal ion source | Masamichi Oi | 2002-10-29 |
| 6437330 | Method and apparatus for adjusting a charged particle beam of a beam optical system | — | 2002-08-20 |
| 6384418 | Sample transfer apparatus and sample stage | Toshiaki Fujii | 2002-05-07 |