Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489612 | Method of measuring film thickness | Toshio Kodama, Yasuhiko Sugiyama | 2002-12-03 |
| 6461692 | Chemical vapor deposition method and chemical vapor deposition apparatus | Motoaki Adachi, Kikuo Okuyama | 2002-10-08 |
| 6395240 | Carrier box for semiconductor substrate | Osamu Horita | 2002-05-28 |
| 6391118 | Method for removing particles from surface of article | Kikuo Okuyama, Manabu Shimada | 2002-05-21 |
| 6384418 | Sample transfer apparatus and sample stage | Yasuhiko Sugiyama | 2002-05-07 |
| 6340381 | Method and apparatus for the preparation of clean gases | Tsukuru Suzuki, Hidetomo Suzuki, Kazuhiko Sakamoto | 2002-01-22 |