Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486471 | Composite charge particle beam apparatus | — | 2002-11-26 |
| 6472881 | Liquid metal ion source and method for measuring flow impedance of liquid metal ion source | Yasuhiko Sugiyama | 2002-10-29 |
| 6452172 | Composite charged particle beam apparatus | — | 2002-09-17 |
| 6452173 | Charged particle apparatus | — | 2002-09-17 |