Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479902 | Semiconductor catalytic layer and atomic layer deposition thereof | Sergey Lopatin | 2002-11-12 |
| 6451119 | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition | Ofer Sneh | 2002-09-17 |
| 6387185 | Processing chamber for atomic layer deposition processes | Kenneth Brian Doering, Prasad N. Gadgil, Thomas E. Seidel | 2002-05-14 |
| 6368954 | Method of copper interconnect formation using atomic layer copper deposition | Sergey Lopatin, Takeshi Nogami | 2002-04-09 |