Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387185 | Processing chamber for atomic layer deposition processes | Kenneth Brian Doering, Carl Galewski, Thomas E. Seidel | 2002-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387185 | Processing chamber for atomic layer deposition processes | Kenneth Brian Doering, Carl Galewski, Thomas E. Seidel | 2002-05-14 |