Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Soichiro Arai, Shigeru Maruyama, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2002-11-26 |
| 6465796 | Charge-particle beam lithography system of blanking aperture array type | Takeshi Haraguchi, Yoshihisa Ooae | 2002-10-15 |