Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Hiroshi Yasuda, Kenichi Miyazawa +4 more | 2002-11-26 |
| 6372347 | Carbon fluoride composite material and process for preparation of same | Fumihiko Yamaguchi, Tomohiro Isogai, Tomohiro Hosomi | 2002-04-16 |