Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486479 | Charged particle beam exposure system and method | Yoshihisa Oae, Tomohiko Abe, Soichiro Arai, Shigeru Maruyama, Kenichi Miyazawa +4 more | 2002-11-26 |
| 6392083 | Process for producing salts of cyanobenzylamines | Isao Yamagami, Masatoshi Murakami, Toru Yoshida | 2002-05-21 |