Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465796 | Charge-particle beam lithography system of blanking aperture array type | Takeshi Haraguchi, Tomohiko Abe | 2002-10-15 |
| 6407398 | Electron beam exposure apparatus and exposure method | Masaki Kurokawa, Tatsuro Ohkawa | 2002-06-18 |