Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414325 | Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen | Akio Yamada | 2002-07-02 |
| 6407398 | Electron beam exposure apparatus and exposure method | Masaki Kurokawa, Yoshihisa Ooae | 2002-06-18 |