Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414325 | Charged particle beam exposure apparatus and exposure method capable of highly accurate exposure in the presence of partial unevenness on the surface of exposed specimen | Tatsuro Ohkawa | 2002-07-02 |
| 6361382 | Terminal assembly providing a space for inserting a cable | Takaharu Kouda, Manabu Hayakawa | 2002-03-26 |