Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495294 | Method for manufacturing semiconductor substrate having an epitaxial film in the trench | Yasushi Urakami, Kunihiro Onoda, Toshio Sakakibara, Yoshinori Otsuka | 2002-12-17 |
| 6495883 | Trench gate type semiconductor device and method of manufacturing | Takumi Shibata, Yasushi Urakami, Toshiyuki Morishita | 2002-12-17 |
| 6406982 | Method of improving epitaxially-filled trench by smoothing trench prior to filling | Yasushi Urakami, Toshio Sakakibara, Hitoshi Yamaguchi, Nobuhiro Tsuji | 2002-06-18 |