Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406982 | Method of improving epitaxially-filled trench by smoothing trench prior to filling | Yasushi Urakami, Shoichi Yamauchi, Toshio Sakakibara, Hitoshi Yamaguchi | 2002-06-18 |