Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439514 | Semiconductor device with elements surrounded by trenches | Yoshitaka Noda | 2002-08-27 |
| 6406982 | Method of improving epitaxially-filled trench by smoothing trench prior to filling | Yasushi Urakami, Shoichi Yamauchi, Toshio Sakakibara, Nobuhiro Tsuji | 2002-06-18 |