Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495294 | Method for manufacturing semiconductor substrate having an epitaxial film in the trench | Shoichi Yamauchi, Yasushi Urakami, Toshio Sakakibara, Yoshinori Otsuka | 2002-12-17 |