Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480275 | High resolution etalon-grating monochromator | Richard L. Sandstrom, Alexander I. Ershov, Igor V. Fomenkov, Scott T. Smith | 2002-11-12 |
| 6477193 | Extreme repetition rate gas discharge laser with improved blower motor | I. Roger Oliver | 2002-11-05 |
| 6452199 | Plasma focus high energy photon source with blast shield | Igor V. Fomenkov, Daniel L. Birx | 2002-09-17 |
| 6442181 | Extreme repetition rate gas discharge laser | I. Roger Oliver, Richard M. Ness, Richard L. Sandstrom, Stuart L. Anderson, Alex P. Ivaschenko +4 more | 2002-08-27 |
| 6425559 | Gas laser chamber with vertical vibration isolator | I. Roger Oliver, Alex P. Ivaschenko, Palash P. Das | 2002-07-30 |
| 6381257 | Very narrow band injection seeded F2 lithography laser | Alexander I. Ershov, Eckehard D. Onkels, Palash P. Das, Thomas Hofmann | 2002-04-30 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, Thomas Patrick Duffey, Richard L. Sandstrom, Alexander I. Ershov | 2002-04-09 |
| 6359922 | Single chamber gas discharge laser with line narrowed seed beam | Xiaojiang Pan, Eckehard D. Onkels | 2002-03-19 |