Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466602 | Gas discharge laser long life electrodes | Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko +4 more | 2002-10-15 |
| 6381257 | Very narrow band injection seeded F2 lithography laser | Alexander I. Ershov, Palash P. Das, William N. Partlo, Thomas Hofmann | 2002-04-30 |
| 6370174 | Injection seeded F2 lithography laser | Palash P. Das, Thomas Patrick Duffey, Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo | 2002-04-09 |
| 6359922 | Single chamber gas discharge laser with line narrowed seed beam | William N. Partlo, Xiaojiang Pan | 2002-03-19 |