Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493374 | Smart laser with fast deformable grating | Igor V. Fomenkov, Frederick Erie, Jesse Buck | 2002-12-10 |
| 6425559 | Gas laser chamber with vertical vibration isolator | I. Roger Oliver, Alex P. Ivaschenko, William N. Partlo | 2002-07-30 |
| 6396582 | Wavelength reference for laser | Jesse Buck, Raymond F. Cybulski, Peter Clarke Newman | 2002-05-28 |
| 6392743 | Control technique for microlithography lasers | Paolo Zambon, Gamaralalage G. Padmabandu, Tom A. Watson | 2002-05-21 |
| 6381257 | Very narrow band injection seeded F2 lithography laser | Alexander I. Ershov, Eckehard D. Onkels, William N. Partlo, Thomas Hofmann | 2002-04-30 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Thomas Patrick Duffey, Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo | 2002-04-09 |