Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480275 | High resolution etalon-grating monochromator | Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Scott T. Smith | 2002-11-12 |
| 6442181 | Extreme repetition rate gas discharge laser | I. Roger Oliver, William N. Partlo, Richard M. Ness, Stuart L. Anderson, Alex P. Ivaschenko +4 more | 2002-08-27 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, Thomas Patrick Duffey, Alexander I. Ershov, William N. Partlo | 2002-04-09 |