Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410429 | Method for fabricating void-free epitaxial-CoSi2 with ultra-shallow junctions | Chaw Sing Ho, Kheng Chok Tee, Kin Leong Pey, G. Karunasiri, Soo Jin Chua +1 more | 2002-06-25 |
| 6350661 | Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts | Chong Wee Lim, Eng Hua Lim, Soh Yun Siah, Chun Hui Low | 2002-02-26 |