Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350661 | Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts | Eng Hua Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low | 2002-02-26 |