Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468851 | Method of fabricating CMOS device with dual gate electrode | Chew Hoe Ang, Randall Cher Liang Cha, Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou +1 more | 2002-10-22 |
| 6429109 | Method to form high k dielectric and silicide to reduce poly depletion by using a sacrificial metal between oxide and gate | Jia Zhen Zheng, Elgin Quek, Mei Sheng Zhou, Daniel Yen, Chew Hoe Ang +1 more | 2002-08-06 |
| 6383922 | Thermal stability improvement of CoSi2 film by stuffing in titanium | Bei Chao Zhang, Chung Woh Lai, Mei Sheng Zhou, Peter Chew, Arthur Ang | 2002-05-07 |
| 6350661 | Silicon nitride capped shallow trench isolation method for fabricating sub-micron devices with borderless contacts | Chong Wee Lim, Soh Yun Siah, Kong Hean Lee, Chun Hui Low | 2002-02-26 |