Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455154 | Production of short fiber silica | Kazuaki Inoue, Ryo Muraguchi, Michio Komatsu | 2002-09-24 |
| 6451436 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Michio Komatsu, Miki Egami | 2002-09-17 |
| 6340641 | Substrate flattening method and film-coated substrate made thereby | Ryo Muraguchi, Atsushi Tonai, Michio Kimatsu, Katsuyuki Machida, Hakaru Kyuragi +1 more | 2002-01-22 |