Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451436 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Michio Komatsu, Akira Nakashima | 2002-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451436 | Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film | Michio Komatsu, Akira Nakashima | 2002-09-17 |