Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468895 | Pattern forming method | Hiromu Ishii, Shouji Yagi, Katsuyuki Machida, Kunio Saito, Tadao Nagatsuma | 2002-10-22 |
| 6429669 | Temperature-insensitive electro-optic probe | Akishige Ito, Katsushi Ohta, Toshiyuki Yagi, Mitsuru Shinagawa, Tadao Nagatsuma | 2002-08-06 |
| 6340641 | Substrate flattening method and film-coated substrate made thereby | Ryo Muraguchi, Akira Nakashima, Atsushi Tonai, Michio Kimatsu, Katsuyuki Machida +1 more | 2002-01-22 |