Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468895 | Pattern forming method | Hiromu Ishii, Shouji Yagi, Kunio Saito, Tadao Nagatsuma, Hakaru Kyuragi | 2002-10-22 |
| 6438257 | Small capacitance change detection device | Hiroki Morimura, Satoshi Shigematsu, Akihiko Hirata | 2002-08-20 |
| 6340641 | Substrate flattening method and film-coated substrate made thereby | Ryo Muraguchi, Akira Nakashima, Atsushi Tonai, Michio Kimatsu, Hakaru Kyuragi +1 more | 2002-01-22 |