Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492822 | Wafer probe station for low-current measurements | Randy Schwindt, Warren K. Harwood, Kenneth R. Smith, Richard H. Warner | 2002-12-10 |
| 6486687 | Wafer probe station having environment control enclosure | Warren K. Harwood, Martin Koxxy | 2002-11-26 |
| 6445202 | Probe station thermal chuck with shielding for capacitive current | Clarence E. Cowan, John Dunklee | 2002-09-03 |
| 6380751 | Wafer probe station having environment control enclosure | Warren K. Harwood, Martin Koxxy | 2002-04-30 |
| 6335628 | Wafer probe station for low-current measurements | Randy Schwindt, Warren K. Harwood, Kenneth R. Smith, Richard H. Warner | 2002-01-01 |