Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483597 | Method for the production of multi-layer systems | Andrey E. Yakshin, Eric Louis | 2002-11-19 |
| 6469310 | Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus | Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik | 2002-10-22 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2002-09-17 |