Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452194 | Radiation source for use in lithographic projection apparatus | Frederik Bijkerk, Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Vadim Yevgenyevich Banine | 2002-09-17 |