Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456362 | Integrating waveguide for use in lithographic projection apparatus | — | 2002-09-24 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Frederik Bijkerk, Henryk Fiedorowicz, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev | 2002-09-17 |